ACTO-SCM is a Scanning Laser Confocal Microscope to do Confocal Laser Microscopy, Optical Spectroscopy and much more!

You can use ACTO-SCM for:

  1. Combining AFM imaging with scanning optical microscopy and spectroscopy (Fluorescence, Photoluminescence, Reflection and Transmission) in real time.
  2. Single Molecular Spectroscopy (including Raman and Fluorescence)
  3. FPA characterization
  4. NLO crystal characterization
  5. Basic Optical Components (ex. lens, mirrors, windows ) for high power applications
  6. Diode laser characterization (VECSEL)


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More information about ACTO-SCM:

ACTO-SCM includes:

  1. Scanner and Confocal optics
  2. Objectives
  3. Sample Holder Stage
  4. Detector
  5. White light source
  6. Color Camera (CMOS)


  1. Dimensions: 20 x 16 x 33 inches
  2. Fast Imaging capabilities: 4 fp/sec to 30 fp/sec
  3. Optical sectioning: up to 100 µm
  4. Field of scan: up to 280 µms
  5. Suitable for wavelengths: from 300 to 700 nm
  6. Lateral resolution: up to 270 nm
  7. Axial resolution: up to 370 nm

Optical Schematic

ACTO-SCM Optical Schematic

SCM schematic

ACTO-SCM Schematic

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Application Examples


 1. Small pixel FPA sidewall characterization


A) Combination of SCM with AFM and Raman spectroscopy


Isometric view of Raman AFM setup
Isometric view of Raman AFM setup

Top view of Raman AFM setup

Sample loading and unloading in Raman AFM setup

Sample loading and unloading in Raman AFM setup

TERS instruments for FPA sidewall characterization

B) 3-D reconstruction to obtain FPA side wall profile applying slicing technique

Through optical sectioning a side wall profile can be obtained. Images are focused at different depths from the pixel top (left). The dashed lines (different colors) inside the figures correspond to the cross sections used to create the FPA side wall profile (right). The data suggests the resolution to be better than 50nm lateral and 150 nm in height.

3-D reconstruction to obtain FPA sidewall

 2.Scanning Confocal Microscopy for NLO crystals

Damage in LBO with AR coating; 15 μm inside the crystal (38×38μm); MO: 50×NA0.85

Damage in LBO with AR coating

LBO crystals in different depts

 3. Scanning Confocal Microscopy with AFM for characterization diode lasers (Vertical Cavity Surface Emitting Laser {VCSEL})

Here we present investigation of vertical-external-cavity-surface-emitting laser (VECSEL) structure applying cross section AFM and confocal optical microscopy at the same time.

Confocal AFM microscopy for VCSEL


Our team demonstrate here characterization data of Vertical Cavite Surface Emitting Diode Laser(VCSEL) MBE structure. This characterization include surface and cross sectional AFM combine with PL and Raman Spectroscopy.

Confocal AFM Microscopy and PL of VCSEL

Cross-Sectional AFM and PL of VCSEL

Cross sectional AFM and confocal scanning microscopy of VECSEl same time


Our technology is based on the combination of a conventional AFM with an ACTOPROBE-developed optical confocal nano-spectroscopy system to obtain topographical information about diode laser structures and Photoluminescence/ Raman spectrum at the same time.



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